Rf power supply has the following characteristics:
1, full digital control
2, pulse working mode, support multiple machine pulse synchronization
3, frequency modulation function, the frequency range of 13.56MHz±5%, can achieve automatic matching function through frequency scanning
4, real-time power and load impedance measurement
5, arc extinguishing function
Product introduction
NOVA RF Power supply is a new generation of multi-functional all-solid-state RF power supplies for semiconductor production and plasma processes. Use full digital control technology. Typically used in plasma etching, PECVD, RF sputtering, parallel plate, RF laser, ICP, RIE, CVD, PVD and other semiconductor and solar film typical processes.
The NOVA RF power supply uses advanced RF power amplifier technology with high efficiency and high stability. This technology can effectively reduce the power loss and increase the life of the equipment.
Fast and intelligent standing wave (VSWR) protection function, the NOVA series RF power supply's standing wave protection can start quickly within milliseconds after the load is abnormal, which can promptly and reliably protect the RF power supply from damage due to load anomalies (such as load ignition, cavity mutation or matcher instability, etc.); And after the load is restored, the RF power supply can automatically remove the standing wave and restore the normal output within milliseconds, without human intervention.
High reliability, the NOVA series RF power supply has an output power margin of more than 20%, thus ensuring long-term stable operation.
Advanced RF power measurement system, the NOVA series RF power supply measurement system adopts V/I Sensor measurement technology, which has the advantages of high sensitivity and high accuracy compared with the common directional coupler measurement technology, and can measure the incident and reflected power more accurately.
Wider power output range, the NOVA series RF power supply uses advanced power amplifier technology, the output power of the RF power supply can be adjusted from 1%, the output power range is 1% to the maximum output power continuously adjustable.
The NOVA RF power supply can operate in two modes: incident power regulation and load power regulation. Two different control methods are also available:
1. Remote control: Support analog control, RS232 and network port
2. Panel control: Use the switch on the front panel, RF POWER adjustment knob, LED display;
dimension
Electrical specification
Heat dissipation and environmental specifications
